Resistivity / Sheet Resistance Measurement |
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| Batch size |
1 |
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| Sheet resistance |
0.005 .. 5e+06 Ω/square |
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| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 600 µm |
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| Wafer size |
|
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| Equipment |
Prometrics 4-point probe |
| Equipment characteristics: |
| Piece dimension Range of wafer piece dimensions the equipment can accept |
50 .. 150 mm |
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| Piece geometry Geometry of wafer pieces the equipment can accept |
circular, irregular, other, rectangular |
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| Piece thickness Range of wafer piece thickness the equipment can accept |
200 .. 700 µm |
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| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
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| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator |
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