1X maskmaking (Image Repeater) |
|
Coating reflectivity Reflectivity of the mask coating |
0.48 |
Defect density |
< 0.05 pinholes/cm2 |
Feature geometry Shape of feature with dimensions characterized by the minimum feature size |
line |
Field geometry Shape of field with dimensions characterized by the maximum field size |
square |
Min feature size |
1 µm |
Reduction |
5 |
Equipment |
Interserv IR maskmaker |
Equipment characteristics: |
File formats List of CAD file formats supported (eg. GDSII, CIF) |
gdsII |
Mask coating Mask coating material (eg. chrome). |
chromium |
Mask plate dimensions Width, length, thickness of the mask plates (eg. 5x7x0.09 inch). |
4x4x0.09 inch, 5x5x0.09 inch |
Mask polarity Polarity of the mask. |
positive |
Max aperture size Size of pattern generator's maximum aperture (e.g., 1 mm) |
20,000x20,000 um |
Max field size |
127 mm |
Min aperture size Size of pattern generator's minimum aperture (e.g., 2 um) |
1x1 um |
Comments: |
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