| Photoresist Blue M Pre- & Post-Bake |
| Sinter |
| Dehydration bake |
| G-line BCB cure |
| G-line photoresist bake (AZ4000) |
| G-line photoresist hardbake (AZ4000) |
| Photoresist hardbake (hotplate @105C) |
| Post-exposure bake (automated) |
| Bake |
| Dehydration bake |
| Hardbake |
| Post-exposure bake |
| Softbake |
