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About MEMS
Lithography: Page 4 of 4
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Contact mask lithography
Maskless lithography
Miscellaneous lithography
Projection mask lithography
Mask making
Metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
10
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per page
Process
Maskless laser write
Contact photolithography
4X DUV photolithography (SVGL Micrascan III)
4X DUV (193nm) photolithography
E-beam Lithography
BCB Contact mask align and exposure
Contact mask align and exposure
Polyimide deposition and pattern
Post-exposure bake (automated)
Contact/proximity printing
E-beam lithography
Hot embossing
Injection molding
Ion beam lithography
Maskless printing
Molding
Pattern transfer
Stamping
Step/repeat projection
X-ray lithography
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