Plasma Asher |
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|---|---|
| Model | M4L |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| Batch sizes | 100 mm: 12, 150 mm: 3 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm, 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, no-flat, notched |
| Wafer holder Device that holds the wafers during processing. |
quartz boat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
Borofloat (Schott), Pyrex (Corning 7740), quartz (single crystal), silicon, silicon on insulator |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1000 µm |