GCA 3600F PG |
|
|---|---|
| Model | 3600F |
| Type | commercial |
| Equipment Characteristics | |
| File formats List of CAD file formats supported (eg. GDSII, CIF) |
cif |
| Mask coatings Mask coating materials (eg. chrome). |
chromium, emulsion |
| Mask plate dimensions Width, length, thickness of the mask plates (eg. 5x7x0.09 inch). |
5x5x.09 inch, 7x7x.09 inch |
| Mask polarity Polarity of the mask. |
either |
| Max aperture size Size of pattern generator's maximum aperture (e.g., 1 mm) |
950x950 um |
| Max field size | 150 mm |
| Min aperture size Size of pattern generator's minimum aperture (e.g., 2 um) |
2x2 um |