MPM TF-100 |
|
|---|---|
| Alternate Name | Thick film printer |
| Manufacturer | MPM |
| Model | TF-100 |
| Type | commercial |
| Comments | |
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| Equipment Characteristics | |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 mm |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
alumina, glass (category), silicon |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
100 .. 1000 µm |