SemiGroup RIE |
|
|---|---|
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 4, 150 mm: 1, 50 mm: 5, 75 mm: 4 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 mm, 75 mm, 100 mm, 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, silicon on insulator, glass (category) |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
200 .. 1000 µm |