MTI BCB coater |
|
|---|---|
| Alternate Name | BCB coater |
| Manufacturer | Machine Technology, Inc. |
| Model | MultiFab Sys. |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 10, 125 mm: 10, 150 mm: 10 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
100 .. 150 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer holder Device that holds the wafers during processing. |
plastic chuck |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon, sapphire, quartz (single crystal), silicon germanium, Foturan (Schott), quartz (fused silica), fused silica, ceramic, glass-ceramic, silicon on insulator, alumina, glass (Hoya), silicon on sapphire, Corning 1737, Borofloat (Schott), Pyrex (Corning 7740), silicon carbide |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
300 .. 1100 µm |