x-tek Revolution |
|
|---|---|
| Model | revolution |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 10 .. 550 mm: 1 |
| MOS clean | no |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
10 .. 550 mm |
| Wafer geometry Types of wafers this equipment can accept |
1-flat, 2-flat, notched, no-flat |
| Wafer thickness List or range of wafer thicknesses the tool can accept |
50 .. 1000 µm |