| Jenoptik Hex 03 | |
|---|---|
| Model | HEX 03 | 
| Type | commercial | 
| Equipment Characteristics | |
| Piece dimension Range of wafer piece dimensions the equipment can accept | 150 mm | 
| Piece geometry Geometry of wafer pieces the equipment can accept | rectangular, circular | 
| Piece thickness Range of wafer piece thickness the equipment can accept | 4 mm | 

