RVM Sputter Tool |
|
|---|---|
| Model | |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 25, 125 mm: 25, 150 mm: 25, 200 mm: 25, 50 .. 76 mm: 25 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
50 .. 76 mm, 100 mm, 125 mm, 150 mm, 200 mm |