STS-AOE |
|
|---|---|
| Model | AOE |
| Type | commercial |
| Equipment Characteristics | |
| Batch sizes | 100 mm: 1, 75 mm: 1 |
| Wafer diameter(s) List or range of wafer diameters the tool can accept |
75 mm, 100 mm |
| Wafer holder Device that holds the wafers during processing. |
conductive platen |
| Wafer materials List of wafer materials this tool can accept (not list of all materials, just the wafer itself). |
silicon carbide |