Ulvac NE-550
Model NE-550
Type commercial
Comments
  • NE-550 ISM (Inductively Super Magnetron) is a multi-purpose high-density plasma etching system, specifically designed for R&D test facilities.
  • It has an optical spectrometer for end-point control.
Equipment Characteristics
Batch sizes 100 mm: 1, 150 mm: 1, 200 mm: 1
MOS clean no
Wafer diameter(s)
List or range of wafer diameters the tool can accept
 100 mm, 150 mm, 200 mm
Wafer geometry
Types of wafers this equipment can accept
 1-flat, 2-flat, notched, no-flat
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 Pyrex (Corning 7740), quartz (fused silica), silicon on insulator, quartz (single crystal), silicon carbide, fused silica, silicon germanium, silicon
Wafer thickness
List or range of wafer thicknesses the tool can accept
 200 .. 1000 µm