E-Beam Services
The MNX offers advanced e-beam lithographic services to its customers. This service is offered at affordable hourly rates, and provides quicker turn-around via a recently installed state-of-the-art e-beam tool. Key benefits of this service include:
- performed on a brand new state-of-the-art e-beam system (Vistec EBPG 5000+ upgraded to accelerate throughput in tool);
- fast scan rate - 50MHz scan speed = high throughput and lower cost;
- spot size below 2.5 nm; large scan field size;
- field stitching and alignment accuracy below 30 nm;
10-wafer holder load lock (reduces pump down times); - fast cycle times;
- service performed by e-beam experts;
- variety of resist types are available;
- inexpensive hourly rates for MNX customers.
